Atomic Force Microscope

Purpose Scanning of the surface morphology without damage of the specimen

1. X-Y scanner
Single module parallel-kinematics flexure stage
Scan size: 100x100 m, Resolution: < 0.05 nm
2. Z-scanner
Guided flexure stage
Scan size: 12 m, Resolution: 0.05 nm
3. Scan Mode: Contact/Noncontact mode

Option User PC, Flow Box
Model / Company XE120/PSIA