Alpha Step

Purpose Measuring the mechanical thickness of structure and surface roughness
Specifications 1. Scan length : 10 mm
2. Scan speed : 2 m/s to 200 m/s
3. Sampling rate : 50, 100, or 200 Hz nominal
4. Vertical Range
At 1 A Resolution : 6.5 m
At 25 A Resolution : 150 m
At 155 A Resolution : 1000 m
5. Horizontal Resolution : 0.01 m (at 2 m/s scan speed)
6. Scan Method : Moving stylus, stationary stage
Option  
Model / Company Alpha-Step 500 / KLA -Tencor