Research Scope & Areas

Development of Nano/MicroElectroMechanicalSystems (N/MEMS) for applications to the creation, detection, transduction, transmission, processing, display and storage of low-level signals and information.

Fundamental Technology:
Modeling, Analysis, and Design
Fabrication Materials
Interconnection and Assembly
Characterization, Testing and Evaluation

Device & System Technology:
Inertial Microsensors & Nanodetectors
Nano & Microactuators
Nano & Micro Electro Mechanical Systems
Functional Microstructures and Nanocomponents

Industry Application and Target Systems:
Automotive and Aerospace Electronics Systems
Information, Computers and Communication Systems
Consumer Electronics & Household Equipment
Biomedical & Environmental Monitoring Systems
Industrial Production and Instrumention