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Nano and Microfabrication
 



Type Equipment
Clean Room Facility Hygro-thermometer, Air-conditioner, Air Shower, Dry Keeper, Chemical Storage,
DI system, UPS, Cleanroom Vacuum Cleaner
Process Monitoring Alpha step , Microscope , 4 Point Probe, Dial Gauge, NanoSpec
Fabrication Mask Plotter, Aligner , Spin Coater, Convection Oven , Wet Station, PECVD , LPCVD , Furnace, KOH Etching System , IR Lamp , Anodic Bonder, Dicing Saw, Asher
Accessaries Wafer Holder, PDMS Jig, Mask Jig

 

logo   NanoSentuating Systems Laboratory (NSL), Korea Advanced Institute of Science and Technology (KAIST)
KAIST 291, Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
(E-mail) nanosys@kaist.ac.kr (Tel) +82-(0)42-350-5354 (Fax) +82-(0)42-350-8690
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